Synthesis of Vertically Aligned ZnO Nanorods Using Sol-gel Seeding and Colloidal Lithography Patterning

Ebrahim Chalangar, Omer Nur, Magnus Willander, Anders Gustafsson, Håkan Pettersson

Research output: Contribution to journalArticlepeer-review

Abstract

Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method can be used to fabricate optimized devices where vertically ordered ZnO nanorods of high crystalline quality are crucial for the device performance.

Original languageEnglish
Article number46
JournalNanoscale Research Letters
Volume16
Issue number1
DOIs
Publication statusPublished - 2021

Subject classification (UKÄ)

  • Nano Technology
  • Condensed Matter Physics

Free keywords

  • Chemical bath deposition
  • Colloidal lithography
  • Nanofabrication
  • Nanorod arrays
  • Seed layer
  • Sol-gel
  • Vertical growth
  • Zinc oxide

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