Temperature dependence of GaSb overgrowth of tungsten on GaSb (001) substrates using MOVPE

Gvidas Astromskas, Mattias Borg, Philippe Caroff, Lars-Erik Wernersson

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceedingpeer-review

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Abstract

We demonstrate GaSb overgrowth over tungsten patterns and that selective area epitaxy is achievable in the W/GaSb system. By controlling the facet growth at low temperatures, it is possible to embed a metal grating in a thin layer.
Original languageEnglish
Title of host publication20th International Conference on Indium Phosphide and Related Materials, 2008. IPRM 2008
PublisherIEEE - Institute of Electrical and Electronics Engineers Inc.
Pages354-356
DOIs
Publication statusPublished - 2008
Event20th International Conference on Indium Phosphide and Related Materials - Versailles, France
Duration: 2008 May 252008 May 29

Publication series

Name
ISSN (Print)1092-8669

Conference

Conference20th International Conference on Indium Phosphide and Related Materials
Country/TerritoryFrance
CityVersailles
Period2008/05/252008/05/29

Subject classification (UKÄ)

  • Condensed Matter Physics

Free keywords

  • tungsten
  • overgrowth
  • lateral growth
  • SAE
  • GaSb

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