Thin electron beam defined hydrogen silsesquioxane spacers for vertical nanowire transistors

Elvedin Memisevic, Erik Lind, Lars-Erik Wernersson

Research output: Contribution to journal › Article › peer-review

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1 Doctoral Thesis (compilation)

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2017
Vertical III-V Nanowire Tunnel Field-Effect Transistor
Memisevic, E., 2017 Aug 21, Lund: The Department of Electrical and Information Technology.
Research output: Thesis › Doctoral Thesis (compilation)

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