Upscaling of multi-beam x-ray ptychography for efficient x-ray microscopy with high resolution and large field of view

Felix Wittwer, Mikhail Lyubomirskiy, Frieder Koch, Maik Kahnt, Martin Seyrich, Jan Garrevoet, Christian David, Christian G. Schroer

Research output: Contribution to journalArticlepeer-review

Abstract

Nondestructive imaging with both a large field of view and a high spatial resolution is crucial to understand complex materials and processes in science and technology. X-ray ptychography can provide highest spatial resolution but is limited in the field of view by the acquisition time and coherent flux at modern x-ray sources. By multi-beam ptychography, the sample can be imaged in parallel by several spatially separated and mutually incoherent beams. We have implemented this method using 3D nanoprinted x-ray optics to create tailor-made x-ray multi-beam arrays. The use of 3D printing allows us to create focusing optics with a minimum of nonfunctional support structures. In this way, large sample areas can be efficiently scanned in parallel with up to six illuminating beams.
Original languageEnglish
Article number171102
Number of pages6
JournalApplied Physics Letters
Volume118
Issue number17
DOIs
Publication statusPublished - 2021

Subject classification (UKÄ)

  • Atom and Molecular Physics and Optics

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