Abstract
Nondestructive imaging with both a large field of view and a high spatial resolution is crucial to understand complex materials and processes in science and technology. X-ray ptychography can provide highest spatial resolution but is limited in the field of view by the acquisition time and coherent flux at modern x-ray sources. By multi-beam ptychography, the sample can be imaged in parallel by several spatially separated and mutually incoherent beams. We have implemented this method using 3D nanoprinted x-ray optics to create tailor-made x-ray multi-beam arrays. The use of 3D printing allows us to create focusing optics with a minimum of nonfunctional support structures. In this way, large sample areas can be efficiently scanned in parallel with up to six illuminating beams.
Original language | English |
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Article number | 171102 |
Number of pages | 6 |
Journal | Applied Physics Letters |
Volume | 118 |
Issue number | 17 |
DOIs | |
Publication status | Published - 2021 |
Subject classification (UKÄ)
- Atom and Molecular Physics and Optics