Vertical nanowire TFETs with channel diameter down to 10 nm and point S MIN of 35 mV/decade

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Abstract

We present experimental data from vertical InAs/InGaAsSb/GaSb nanowire tunnel field-effect transistors with channel diameter scaled down to 10 nm and ability to reach a point subthreshold swing of 35 mV/decade at VDS = 0.05 V. Furthermore, the impact of drain, channel and source diameter scaling on the subthreshold swing and currents are studied. Impact of gate-overlap is more evident for devices with highly scaled source due to strong reduction of the current. Furthermore, small channel diameter makes these devices more susceptible to Random Telegraph Signal noise.

Original languageEnglish
Pages (from-to)1089-1091
JournalIEEE Electron Device Letters
Volume39
Issue number7
Early online date2018 May 14
DOIs
Publication statusPublished - 2018 Jul

Subject classification (UKÄ)

  • Nano-technology

Free keywords

  • GaSb
  • Heterojunctions
  • III-V
  • InAs
  • InGaAsSb
  • Logic gates
  • Nanoscale devices
  • Resistance
  • RTS
  • steep-slope
  • TFET
  • TFETs
  • Vertical Nanowires

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