Field Emission Scanning Electron Microscope with EDS/EBSD-analysis
Research areas and keywords
Type of infrastructure
DescriptionThe laboratory consists of a variable pressure Tescan Mira3 High Resolution Schottky FE-SEM equipped with Oxford EDS and EBSD system and a CL system.
The instrument allows for:
•High-resolution imaging in both high- and low-vacuum mode
•Qualitative and quantitative elemental analyses
•Qualitative and quantitative line scans and elemental mapping
•Electron backscatter diffraction (EBSD) studies
Equipment and resourcesInstrumentModel: Tescan Mira3Resolution: 1.0 nm, at 30kV and high vacuum modeElectron source: High brightness Schottky emitterAcceleration voltage: 50V to 30kVVacuum: high vacuum <9 × 10-3 Pa, low vacuum 7 to 500 Pa.Chamber: Internal diameter: 340 mm (width) × 315 mm (depth)Beam Deceleration Technology (BDT) for resolution at low beam voltagesDecontaminator/plasma cleaner DetectorsStandard ET SE detectorIn-beam (in-lens) back scatter detectorIn-beam (in-lens) secondary electron detectorRetractable back scatter detectorLow vacuum (up to 500 Pa) secondary electron detectorPanchromatic motorized retractable CL detector (spectral range of 185 – 850 nm)Energy dispersive spectrometer: X-MaxN 80 from Oxford Instruments (124 eV, 80mm2)Electron backscatter diffraction spectrometer: NordlysNano from Oxford InstrumentsAnalytical software: Automated AZtecEnergy
Services providedThe laboratory is foremost dedicated to academic research conducted by investigators at the department, but external users, such as researchers from universities, laboratories and industry are also welcome.
Management of the infrastructureDr. Carl Alwmark
Available for loanAvailable for loan - internal and external
Terms of access:
Contact Carl Alwmark, see webpage.