Hertz laboratory

Infrastructure

Research areas and keywords

UKÄ subject classification

  • Engineering and Technology

Type of infrastructure

  • Equipment

Description

Small clean room for silicon, glass and polymer microfabrication.

Equipment and resources

Thermco Oxidation furnace, Heidelberg DWL66+ mask writer, Karl Süss MA4 mask aligner, Brewer 100CB spinner, Edwards auto306 metal evaporator, wet etching equipment, Micro Automation 602M dicing saw, Ambios XP-1 profilometer, microscopy.

Available for loan

Not available for loan