LNL -

Lund NanoLab

Infrastructure

Research areas and keywords

UKÄ subject classification

  • Engineering and Technology

Type of infrastructure

  • Equipment

Name of national/international infrastructure this infrastructure belongs to

LNL is part of the Swedish infrastructure Myfab, which is a network of cleanrooms connected to universities in Sweden. It is also in close collaboration with the Scandinavian cleanroom network NorFab, DTU Danchip Lab in Copenhagen and the Micronova cleanroom in Helsinki, Finland.
Close collaborations with other LU infrastructures, like FTF's optical and electrical characterization labs, nCHREM, LUSP and MAX IV.

Description

Lund Nano Lab (LNL), which is part of the Division of Solid State Physics (FTF) and the NanoLund consortium, is a state of the art cleanroom facility run by expert staff. It offers space, equipment and expertise for cutting edge nano and micro fabrication both in fundamental research and device development.Key figures: 1) About 600 m2 of ISO 5-8 class cleanroom 2) 140 - 150 active users (2013-2018). 3) >80 installed tools. 3) 53 000 - 59 000 booked tool hours/year (2013-2018). 6 - 8 companies with own personnel that use LNL (2013-2018).
We are actively adding new equipment, replacing old ones and searching for funding to continuously improve our facility.
LNL has grown out of the division of solid state physics, where it started as a cleanroom and processing facility. LNL has about 150 active users, within LTH and LU. Additional users come from other academic institutions as well as industry.
The infrastructure provides important facilities for a number of research groups at LTH, science and medical faculties.
We are currently planning to move LNL into new facilities at Science Village in Brunnshög just outside of the city of Lund.

Equipment and resources

Semiconductor growth:
3 MOVPE tools (one dedicated to nitrides)
plus a research MOVPE tool;
In addition:
1 CBE tool (for high quality interfaces), Aerotaxy system (gas phase nanowire synthesis), aerosol system.
Thin film deposition:
evaporators (metals) (thermal and e-beam)
1 sputter tool (various materials)
1 PECVD tool for SixOy and SixNy
3 ALD tools (various materials)
1 plating bath
Lithography (patterning):
2 EBL systems (electron beam litho)
3 optical mask aligners (contact)
Nanoimprint system
Talbot Displacement Lithography
Etching:
3 plasma etchers
2 plasma ashers
Various wet etch stations throughout the Laboratory spaces
Characterization:
PL station
3 SEMs (1 FIB SEM)
1 Analytical SEM with EDS
XRD tool
AFM and Profilometer
Spectroscopic ellipsometer
Tensiometer
Probe station
General: Optical microscopes, wet benches (acid and solvent), hot plates, spin coaters.

Services provided

Key features: 1) Fabrication and analysis of structures on the nanometer-scale. 2) Integration between epitaxy and processing. 3) Open cleanroom facility for academic research and companies. 4) Cleanroom lab for cutting edge nano and micro fabrication. 5) Industrial product development and prototype testing.
LNL provides services for several infrastructures at LTH and the Science faculty. Notably the infrastructures at solid state physics (bio, optics and transport), nCHREM, and LUSP.

Many of the tools generate digital data that are initially stored on the lab computers and optionally stored on an off-line server. This server is accessible from outside the laboratory areas whereas the lab computers are only accessible within the labs.

Management of the infrastructure

LNL is managed by a Laboratory Director and is supported by 13 experienced staff members. There is also an LNL Deputy Director.
To optimize day-to-day operations, LNL management engages a Reference Group, a User Group and a Staff group respectively.

Available for loan

Available for loan - internal and external

Terms of access:

To access LNL, academic as well as industrial users must contact the Lab Manager. After mandatory initial training, the user will be granted access to the cleanrooms. Additional training for each individual piece of equipment is needed to be allowed to use it. Users will have to pay a monthly fee to access the facility and an additional hourly tool rate. LNL is part of LTH open door, see web page.

The running costs are paid for by the user, in the form of either hourly rates or lab fees. There are separate fees for academic and industrial users. Each equipment has an hourly rate.