Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 1520-8567

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  1. 2015
  2. Concept for assembling individual nanostructure-based components into complex devices

    Suyatin, D., Sundberg, R., Maximov, I., Shleev, S. & Lars Montelius, 2015, In : Journal of Vacuum Science and Technology B. 33, 6, 062202.

    Research output: Contribution to journalArticle

  3. 2014
  4. 2013
  5. Epitaxial growth and surface studies of the Half Heusler compound NiTiSn (001)

    Kawasaki, J. K., Neulinger, T., Rainer Timm, Martin Hjort, Zakharov, A., Anders Mikkelsen, Schultz, B. D. & Palmstrom, C. J., 2013, In : Journal of Vacuum Science and Technology B. 31, 4, 04D106.

    Research output: Contribution to journalArticle

  6. 2012
  7. Optimization of a self-closing effect to produce nanochannels with top slits in fused silica

    Graczyk, M., Balaz, M., Kvennefors, A., Heiner Linke & Maximov, I., 2012, In : Journal of Vacuum Science and Technology B. 30, 6, 06FF09.

    Research output: Contribution to journalArticle

  8. Thin InAs membranes and GaSb buffer layers on GaAs(001) substrates

    Astromskas, G., Mattias Borg & Lars-Erik Wernersson, 2012, In : Journal of Vacuum Science and Technology B. 30, 5, 051202.

    Research output: Contribution to journalArticle

  9. 2011
  10. Parameter space mapping of InAs nanowire crystal structure

    Kimberly Dick Thelander, Bolinsson, J., Maria Messing, Sebastian Lehmann, Jonas Johansson & Caroff, P., 2011, In : Journal of Vacuum Science and Technology B. 29, 4, 04D103.

    Research output: Contribution to journalArticle

  11. 2010
  12. Integration, gap formation, and sharpening of III-V heterostructure nanowires by selective etching

    Kallesoe, C., Molhave, K., Larsen, K. F., Engstrom, D., Hansen, T. M., Boggild, P., Mårtensson, T., Magnus Borgström & Lars Samuelson, 2010, In : Journal of Vacuum Science and Technology B. 28, 1, p. 21-26

    Research output: Contribution to journalArticle

  13. 2009
  14. Gallium phosphide nanowire arrays and their possible application in cellular force investigations

    Suyatin, D., Hällström, W., Lars Samuelson, Lars Montelius, Christelle Prinz & Kanje, M., 2009, In : Journal of Vacuum Science and Technology B. 27, 6, p. 3092-3094

    Research output: Contribution to journalArticle

  15. 2008
  16. Double oxidation scheme for tunnel junction fabrication

    Holmqvist, T., Meschke, M. & Pekola, J. P., 2008, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26, 1, p. 28-31 4 p.

    Research output: Contribution to journalArticle

  17. 2007
  18. Benchmarking of 50 nm features in thermal nanoimprint

    Gourgon, C., Chaix, N., Schift, H., Tormen, M., Landis, S., Torres, C. M. S., Kristensen, A., Pedersen, R. H., Christiansen, M. B., Fernandez-Cuesta, I., Mendels, D., Lars Montelius & Haatainen, T., 2007, In : Journal of Vacuum Science and Technology B. 25, 6, p. 2373-2378

    Research output: Contribution to journalArticle

  19. 2005
  20. Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography

    Keil, M., Beck, M., Ling, T. G. I., Graczyk, M., Lars Montelius & Heidari, B., 2005, In : Journal of Vacuum Science and Technology B. 23, 2, p. 575-584

    Research output: Contribution to journalArticle

  21. Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography

    Bilenberg, B., Hansen, M., Johansen, D., Ozkapici, V., Jeppesen, C., Szabo, P., Obieta, I. M., Arroyo, O., Jonas Tegenfeldt & Kristensen, A., 2005, In : Journal of Vacuum Science and Technology B. 23, 6, p. 2944-2949

    Research output: Contribution to journalArticle

  22. 2004
  23. Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography

    Keil, M., Beck, M., Frennesson, G., Theander, E., Bolmsjo, E., Lars Montelius & Heidari, B., 2004, In : Journal of Vacuum Science and Technology B. 22, 6, p. 3283-3287

    Research output: Contribution to journalArticle

  24. 2003
  25. Electric field effects in single semiconductor quantum dots observed by scanning tunneling luminescence

    Håkanson, U., Hakanson, H., Johansson, M., Lars Samuelson & Mats-Erik Pistol, 2003, In : Journal of Vacuum Science and Technology B. 21, 6, p. 2344-2347

    Research output: Contribution to journalArticle

  26. 2002
  27. Epitaxially overgrown, stable W-GaAs Schottky contacts with sizes down to 50 nm

    Lars-Erik Wernersson, Georgsson, K., Anders Gustafsson, Anneli Löfgren, Lars Montelius, Nilsson, N., Pettersson, H., Seifert, W., Lars Samuelson & Jan-Olle Malm, 2002, In : Journal of Vacuum Science and Technology B. 20, 2, p. 580-589

    Research output: Contribution to journalArticle

  28. Scanning photoelectron microscopy study of as-grown and heat-treated chemical vapor deposition boron-doped diamond films

    Zakharov, A., Ralchenko, V., Khmelnitskii, R. & Ingolf Lindau, 2002, In : Journal of Vacuum Science and Technology B. 20, 6, p. 2509-2513

    Research output: Contribution to journalArticle

  29. 1997
  30. Nanometer table-top proximity x-ray lithography with liquid-target laser-plasma source

    Malmqvist, L., Bogdanov, A. L., Lars Montelius & Hertz, H. M., 1997, In : Journal of Vacuum Science and Technology B. 15, 4, p. 814-817

    Research output: Contribution to journalArticle

  31. 1994