Microelectronic Engineering, 1873-5568

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  1. 2019
  2. 2018
  3. Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques

    Graczyk, M., Cattoni, A., Rösner, B., Seniutinas, G., Anette Löfstrand, Kvennefors, A., Mailly, D., David, C. & Maximov, I., 2018 Apr 15, In : Microelectronic Engineering. 190, p. 73-78 6 p.

    Research output: Contribution to journalArticle

  4. 2017
  5. 1/f and RTS noise in InGaAs nanowire MOSFETs

    Möhle, C., Zota, C. B., M. Hellenbrand & E. Lind, 2017 Jun 25, In : Microelectronic Engineering. 178, p. 52-55

    Research output: Contribution to journalArticle

  6. 2015
  7. III-V nanowires for logics and beyond

    Lars-Erik Wernersson, 2015, In : Microelectronic Engineering. 147, p. 344-348

    Research output: Contribution to journalArticle

  8. Transfer of vertical nanowire arrays on polycaprolactone substrates for biological applications

    von Ahnen, I., Piret, G. & Christelle Prinz, 2015, In : Microelectronic Engineering. 135, p. 52-56

    Research output: Contribution to journalArticle

  9. 2012
  10. Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect

    Graczyk, M., Balaz, M., Heiner Linke & Maximov, I., 2012, In : Microelectronic Engineering. 97, p. 173-176

    Research output: Contribution to journalArticle

  11. Fabrication of high aspect ratio SU-8 micropillar arrays

    Amato, L., Keller, S. S., Heiskanen, A., Dimaki, M., Emnéus, J., Boisen, A. & Tenje, M., 2012, In : Microelectronic Engineering. 98, Special issue MNE 2011 - Part II, p. 483-487

    Research output: Contribution to journalArticle

  12. 2011
  13. Development of nanoporous gold electrodes for electrochemical applications

    Quan, X., Fischer, L. M., Boisen, A. & Tenje, M., 2011, In : Microelectronic Engineering. 88, 8, p. 2379-2382

    Research output: Contribution to journalArticle

  14. Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

    Meng, F., Luo, G., Maximov, I., Lars Montelius, Chu, J. & Hongqi Xu, 2011, In : Microelectronic Engineering. 88, 10, p. 3108-3112

    Research output: Contribution to journalArticle

  15. 2009
  16. Gold cleaning methods for electrochemical detection applications

    Fischer, L. M., Tenje, M., Heiskanen, A. R., Masuda, N., Castillo Leon, J., Bentien, A., Emnéus, J., Jakobsen, M. H. & Boisen, A., 2009, In : Microelectronic Engineering. 86, 4-6, p. 1282-1285

    Research output: Contribution to journalArticle

  17. 2008
  18. Nanoimprint in PDMS on glass with two-level hybrid stamp

    Carlberg, P., Lars Montelius & Jonas Tegenfeldt, 2008, In : Microelectronic Engineering. 85, 1, p. 210-213

    Research output: Contribution to journalArticle

  19. Selective etching of III-V nanowires for molecular junctions

    Kallesoe, C., Molhave, K., Mårtensson, T., Hansen, T. M., Lars Samuelson & Boggild, P., 2008, In : Microelectronic Engineering. 85, 5-6, p. 1179-1181

    Research output: Contribution to journalArticle

  20. 2006
  21. Exposure parameters for MeV proton beam writing on SU-8

    Auzelyte, V., Mikael Elfman, Per Kristiansson, Nilsson, C., Jan Pallon, Arteaga, N. & Wegdén, M., 2006, In : Microelectronic Engineering. 83, 10, p. 2015-2020

    Research output: Contribution to journalArticle

  22. High resolution 100kV electron beam lithography in SU-8

    Bilenberg, B., Jacobsen, S., Schmidt, M. S., Skjolding, L. H. D., Shi, P., Bøggild, P., J.O. Tegenfeldt & Kristensen, A., 2006, In : Microelectronic Engineering. 83, 4-9, p. 1609-1612

    Research output: Contribution to journalArticle

  23. Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing

    Tenje, M., Hübner, J. & Boisen, A., 2006, In : Microelectronic Engineering. 83, 4/9, p. 1269-1272

    Research output: Contribution to journalArticle

  24. 2005
  25. Dry release of all-polymer structures

    Haefliger, D., Tenje, M., Rasmussen, P. A. & Boisen, A., 2005, In : Microelectronic Engineering. 78/79, p. 88-92

    Research output: Contribution to journalArticle

  26. Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold

    Tenje, M., Johansson, A., Sánchez Noguerón, E., Clausen, B., Calleja, M. & Boisen, A., 2005, In : Microelectronic Engineering. 78/79, p. 152-157

    Research output: Contribution to journalArticle

  27. 2004
  28. Dry release of suspended nanostructures

    Forsen, E., Davis, ZJ., Dong, M., Ghatnekar-Nilsson, S., Lars Montelius & Boisen, A., 2004, In : Microelectronic Engineering. 73-74, p. 487-490

    Research output: Contribution to journalArticle

  29. Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

    Forsen, E., Carlberg, P., Lars Montelius & Boisen, A., 2004, In : Microelectronic Engineering. 73-74, p. 491-495

    Research output: Contribution to journalArticle

  30. Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

    Beck, M., Persson, F., Carlberg, P., Graczyk, M., Maximov, I., Ling, TGI. & Lars Montelius, 2004, In : Microelectronic Engineering. 73-74, p. 837-842

    Research output: Contribution to journalArticle

  31. 2003
  32. Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production

    Bogdanov, A. L., Holmqvist, T., Jedrasik, P. & Nilsson, B., 2003 Jun, In : Microelectronic Engineering. 67-68, p. 381-389 9 p.

    Research output: Contribution to journalArticle

  33. A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

    Pfeiffer, K., Reuther, F., Fink, M., Gruetzner, G., Carlberg, P., Maximov, I., Lars Montelius, Seekamp, J., Zankovych, S., Sotomayor-Torres, C. M., Schulz, H. & Scheer, H. C., 2003, In : Microelectronic Engineering. 67-8, p. 266-273

    Research output: Contribution to journalArticle

  34. Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

    Ling, TGI., Beck, M., Bunk, R., Forsen, E., Jonas Tegenfeldt, Zakharov, A. & Lars Montelius, 2003, In : Microelectronic Engineering. 67-8, p. 887-892

    Research output: Contribution to journalArticle

  35. Interfacial nanofabrication strategies in development of new functional nanomaterials and planar supramolecular nanostructures for nanoelectronics and nanotechnology

    Khomutov, G. B., Kislov, V. V., Antipina, M. N., Gainutdinov, R. V., Gubin, S. P., Obydenov, A. Y., Pavlov, S. A., Rakhnyanskaya, A. A., Sergeev-Cherenkov, A. N., Soldatov, E. S., Suyatin, D., Tolstikhina, A. L., Trifonov, A. S. & Yurova, T. V., 2003, In : Microelectronic Engineering. 69, p. 373-383

    Research output: Contribution to journalArticle

  36. Molecular cluster based nanoelectronics

    Soldatov, ES., Gubin, SP., Maximov, I., Khomutov, GB., Kolesov, VV., Sergeev-Cherenkov, AN., Shorokhov, VV., Sulaimankulov, KS. & Suyatin, DB., 2003, In : Microelectronic Engineering. 69, p. 536-548

    Research output: Contribution to journalArticle

  37. Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP

    Maximov, I., Carlberg, P., Shorubalko, I., Wallin, D., Sarwe, E-L., Beck, M., Graczyk, M., Seifert, W., Hongqi Xu, Lars Montelius & Lars Samuelson, 2003, In : Microelectronic Engineering. 67-8, p. 196-202

    Research output: Contribution to journalArticle

  38. Towards a 'nano-traffic' system powered by molecular motors

    Bunk, R., Klinth, J., Rosengren, J., Nicholls, I., Tagerud, S., Pär Omling, Mansson, A. & Lars Montelius, 2003, In : Microelectronic Engineering. 67-8, p. 899-904

    Research output: Contribution to journalArticle

  39. 2002
  40. Concept, construction and commissioning of an alignment system for deep X-ray lithography

    Wilhelmi, O., Peredkov, S. & Bogdanov, A., 2002, In : Microelectronic Engineering. 61-2, p. 1107-1112

    Research output: Contribution to journalArticle

  41. Improving stamps for 10 nm level wafer scale nanoimprint lithography

    Beck, M., Graczyk, M., Maximov, I., Sarwe, E-L., Ling, TGI., Keil, M. & Lars Montelius, 2002, In : Microelectronic Engineering. 61-2, p. 441-448

    Research output: Contribution to journalArticle

  42. Polymer stamps for nanoimprinting

    Pfeiffer, K., Fink, M., Ahrens, G., Gruetzner, G., Reuther, F., Seekamp, J., Zankovych, S., Torres, CMS., Maximov, I., Beck, M., Graczyk, M., Lars Montelius, Schulz, H., Scheer, HC. & Steingrueber, F., 2002, In : Microelectronic Engineering. 61-2, p. 393-398

    Research output: Contribution to journalArticle

  43. 1999
  44. Single-electron devices via controlled assembly of designed nanoparticles

    Junno, T., Martin H. Magnusson, Carlsson, S. B., Knut Deppert, Jan Olle Malm, Lars Montelius & Lars Samuelson, 1999 Jun, In : Microelectronic Engineering. 47, 1-4, p. 179-183 5 p.

    Research output: Contribution to journalArticle

  45. 1997
  46. Liquid-target laser-plasma source for X-ray lithography

    Malmqvist, L., Bogdanov, A. L., Lars Montelius & Hertz, H. M., 1997, In : Microelectronic Engineering. 35, 1-4, p. 535-536

    Research output: Contribution to journalArticle