Microelectronic Engineering, 1873-5568

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  1. 2019
  3. 2018

  4. Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques

    Mariusz Graczyk, Andrea Cattoni, Benedikt Rösner, Gediminas Seniutinas, Anette Löfstrand, Anders Kvennefors, Dominique Mailly, Christian David & Ivan Maximov, 2018 Apr 15, In : Microelectronic Engineering. 190, p. 73-78 6 p.

    Research output: Contribution to journal › Article

  5. 2017

  6. 1/f and RTS noise in InGaAs nanowire MOSFETs

    C. Möhle, C. B. Zota, M. Hellenbrand & E. Lind, 2017 Jun 25, In : Microelectronic Engineering. 178, p. 52-55

    Research output: Contribution to journal › Article

  7. 2015

  8. III-V nanowires for logics and beyond

    Lars-Erik Wernersson, 2015, In : Microelectronic Engineering. 147, p. 344-348

    Research output: Contribution to journal › Article

  9. Transfer of vertical nanowire arrays on polycaprolactone substrates for biological applications

    Inga von Ahnen, Gaelle Piret & Christelle Prinz, 2015, In : Microelectronic Engineering. 135, p. 52-56

    Research output: Contribution to journal › Article

  10. 2012

  11. Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect

    Mariusz Graczyk, Martina Balaz, Heiner Linke & Ivan Maximov, 2012, In : Microelectronic Engineering. 97, p. 173-176

    Research output: Contribution to journal › Article

  12. Fabrication of high aspect ratio SU-8 micropillar arrays

    Letizia Amato, Stephan S. Keller, Arto Heiskanen, Maria Dimaki, Jenny Emnéus, Anja Boisen & Maria Tenje, 2012, In : Microelectronic Engineering. 98, Special issue MNE 2011 - Part II, p. 483-487

    Research output: Contribution to journal › Article

  13. 2011

  14. Development of nanoporous gold electrodes for electrochemical applications

    Xueling Quan, Lee M. Fischer, Anja Boisen & Maria Tenje, 2011, In : Microelectronic Engineering. 88, 8, p. 2379-2382

    Research output: Contribution to journal › Article

  15. Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

    Fantao Meng, Gang Luo, Ivan Maximov, Lars Montelius, Jinkui Chu & Hongqi Xu, 2011, In : Microelectronic Engineering. 88, 10, p. 3108-3112

    Research output: Contribution to journal › Article

  16. 2009

  17. Gold cleaning methods for electrochemical detection applications

    Lee M. Fischer, Maria Tenje, Arto R. Heiskanen, Noriyuki Masuda, Jaime Castillo Leon, Anders Bentien, Jenny Emnéus, Mogens H. Jakobsen & Anja Boisen, 2009, In : Microelectronic Engineering. 86, 4-6, p. 1282-1285

    Research output: Contribution to journal › Article

  18. 2008

  19. Nanoimprint in PDMS on glass with two-level hybrid stamp

    Patrick Carlberg, Lars Montelius & Jonas Tegenfeldt, 2008, In : Microelectronic Engineering. 85, 1, p. 210-213

    Research output: Contribution to journal › Article

  20. Selective etching of III-V nanowires for molecular junctions

    Christian Kallesoe, Kristian Molhave, Thomas Mårtensson, Torben Mikael Hansen, Lars Samuelson & Peter Boggild, 2008, In : Microelectronic Engineering. 85, 5-6, p. 1179-1181

    Research output: Contribution to journal › Article

  21. 2006

  22. Exposure parameters for MeV proton beam writing on SU-8

    Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Christer Nilsson, Jan Pallon, Natalia Arteaga & Marie Wegdén, 2006, In : Microelectronic Engineering. 83, 10, p. 2015-2020

    Research output: Contribution to journal › Article

  23. High resolution 100kV electron beam lithography in SU-8

    B. Bilenberg, S. Jacobsen, M.s. Schmidt, L.h.d. Skjolding, P. Shi, P. Bøggild, J.O. Tegenfeldt & A. Kristensen, 2006, In : Microelectronic Engineering. 83, 4-9, p. 1609-1612

    Research output: Contribution to journal › Article

  24. Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing

    Maria Nordström, Jörg Hübner & Anja Boisen, 2006, In : Microelectronic Engineering. 83, 4/9, p. 1269-1272

    Research output: Contribution to journal › Article

  25. 2005

  26. Dry release of all-polymer structures

    D. Haefliger, Maria Nordström, P. A. Rasmussen & Anja Boisen, 2005, In : Microelectronic Engineering. 78/79, p. 88-92

    Research output: Contribution to journal › Article

  27. Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold

    Maria Nordström, Alicia Johansson, Encarnacion Sánchez Noguerón, Bjarne Clausen, Montserrat Calleja & Anja Boisen, 2005, In : Microelectronic Engineering. 78/79, p. 152-157

    Research output: Contribution to journal › Article

  28. 2004

  29. Dry release of suspended nanostructures

    E Forsen, ZJ Davis, M Dong, Sara Ghatnekar-Nilsson, Lars Montelius & A Boisen, 2004, In : Microelectronic Engineering. 73-74, p. 487-490

    Research output: Contribution to journal › Article

  30. Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

    E Forsen, Patrick Carlberg, Lars Montelius & A Boisen, 2004, In : Microelectronic Engineering. 73-74, p. 491-495

    Research output: Contribution to journal › Article

  31. Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

    Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, TGI Ling & Lars Montelius, 2004, In : Microelectronic Engineering. 73-74, p. 837-842

    Research output: Contribution to journal › Article

  32. 2003

  33. Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production

    Alexei L. Bogdanov, Tommy Holmqvist, Piotr Jedrasik & Bengt Nilsson, 2003 Jun, In : Microelectronic Engineering. 67-68, p. 381-389 9 p.

    Research output: Contribution to journal › Article

  34. A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

    K Pfeiffer, F Reuther, M Fink, G Gruetzner, Patrick Carlberg, Ivan Maximov, Lars Montelius, J Seekamp, S Zankovych, C M Sotomayor-Torres, H Schulz & H C Scheer, 2003, In : Microelectronic Engineering. 67-8, p. 266-273

    Research output: Contribution to journal › Article

  35. Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

    TGI Ling, Marc Beck, Richard Bunk, E Forsen, Jonas Tegenfeldt, Alexei Zakharov & Lars Montelius, 2003, In : Microelectronic Engineering. 67-8, p. 887-892

    Research output: Contribution to journal › Article

  36. Interfacial nanofabrication strategies in development of new functional nanomaterials and planar supramolecular nanostructures for nanoelectronics and nanotechnology

    G.B. Khomutov, V.V. Kislov, M.N. Antipina, R.V. Gainutdinov, S.P. Gubin, A.Yu. Obydenov, S.A. Pavlov, A.A. Rakhnyanskaya, A.N. Sergeev-Cherenkov, E.S. Soldatov, Dmitry Suyatin, A.L. Tolstikhina, A.S. Trifonov & T.V. Yurova, 2003, In : Microelectronic Engineering. 69, p. 373-383

    Research output: Contribution to journal › Article

  37. Molecular cluster based nanoelectronics

    ES Soldatov, SP Gubin, Ivan Maximov, GB Khomutov, VV Kolesov, AN Sergeev-Cherenkov, VV Shorokhov, KS Sulaimankulov & DB Suyatin, 2003, In : Microelectronic Engineering. 69, p. 536-548

    Research output: Contribution to journal › Article

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