A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

Research output: Contribution to journalArticle

Abstract

We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.
Novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

Details

Authors
  • Maria Tenje
  • Montserrat Calleja
  • Jörg Hübner
  • Anja Boisen
External organisations
  • Technical University of Denmark
Research areas and keywords

Subject classification (UKÄ) – MANDATORY

  • Medical Engineering
Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number1
Publication statusPublished - 2008
Publication categoryResearch
Peer-reviewedYes
Externally publishedYes