Fabrication and improvement of nanopillar InGaN/GaN light-emitting diodes using nanosphere lithography

Research output: Contribution to journalArticle


Surface-patterning technologies have enabled the improvement of currently existing light-emitting diodes (LEDs) and can be used to overcome the issue of low quantum efficiency of green GaN-based LEDs. We have applied nanosphere lithography to fabricate nanopillars on InGaN/GaN quantum-well LEDs. By etching through the active region, it is possible to improve both the light extraction efficiency and, in addition, the internal quantum efficiency through the effects of lattice strain relaxation. Nanopillars of different sizes are fabricated and analyzed using Raman spectroscopy. We have shown that nanopillar LEDs can be significantly improved by applying a combination of ion-damage curing techniques, including thermal and acidic treatment, and have analyzed their effects using x-ray photoelectron spectroscopy. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)


  • Ahmed Fadil
  • Yiyu Ou
  • Teng Zhan
  • Kaiyu Wu
  • Dmitry Suyatin
  • Weifang Lu
  • Paul Michael Petersen
  • Zhiqiang Liu
  • Haiyan Ou
Research areas and keywords

Subject classification (UKÄ) – MANDATORY

  • Nano Technology


  • light-emitting diodes, gallium nitride, nanopillar, damage treatment
Original languageEnglish
Article number093062
JournalJournal of Nanophotonics
Issue number1
Publication statusPublished - 2015
Publication categoryResearch

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