Growth of Super conducting YBaCuO Thin Films by RF Magnetron Sputtering on LiNbO:Ti Substrates using YSZ Buffer Layer

Research output: ThesisLicentiate Thesis


YBa2Cu3O7-δ (YBCO) with low RF losses has been successfully deposited onto lithium niobate (LNO) to improve the performance of electrooptic Mach-Zender modulators. Epitaxial, c-axis oriented superconducting YBCO thin films have been grown on X-cut LNO single crystals with a yttria-stabilized zirconia (YSZ) buffer layer by RF magnetron sputtering. This buffer layer is needed to obtain good superconducting properties of the YBCO grown. Numerical tools have been developed to analyze CPW structures based on YBCO/YSZ/LNO trilayers, and they indicate that YSZ thickness has to be kept to the minimum necessary for good YBCO growth.


External organisations
  • University of Barcelona
Research areas and keywords

Subject classification (UKÄ) – MANDATORY

  • Electrical Engineering, Electronic Engineering, Information Engineering
Original languageOther
Supervisors/Assistant supervisor
  • Fàbrega, Lourdes, Supervisor, External person
  • Department of Applied Physics and Electronics, University of Barcelona
Publication statusPublished - 1998
Publication categoryResearch
Externally publishedYes