Low power piezoelectric micro mass flow controller for liquid fuel injection

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceeding


Utilization of an ethanol driven, combustion-based power generator promises high-efficiency combustion in diesel-like engines and avoids problems connected to shrinking supplies of fossil fuels since fuels like ethanol or dimethyl ether can be produced from renewable resources. Fuel injection into such generator through a piezoelectric micro mass flow controller (MMFC) features low power consumption and enables self-sustaining operation: Only a negligible amount of generated power is re-used for injection and combustion control. A micro-machined MMFC with power consumption during steady state operation of 20μW at 120V is presented herein. The MMFC, which is designed like a normally-closed, on-/off-operating valve is connected to a pressurized fuel tank for testing and operation. Integrated piezoresistors are used for flow rate feedback control and an implemented pn-diode (sensitivity: -2.5mV/K) enables on-chip temperature monitoring. Ethanol flow rates of up to 70μl/s at 100kPa fuel pressure have been demonstrated.


  • Michael Schiffer
  • Ernst Obermeier
  • Cesare Stefanini
  • Vittorio Manente
  • Per Tunestål
External organisations
  • Technical University of Berlin
  • Sant’anna School Of Advanced Studies
Research areas and keywords

Subject classification (UKÄ) – MANDATORY

  • Energy Engineering
Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Number of pages4
Publication statusPublished - 2007
Publication categoryResearch
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: 2007 Oct 282007 Oct 31


Conference6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA