PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

Research output: Chapter in Book/Report/Conference proceedingPaper in conference proceeding

Abstract

In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

Details

Authors
  • Christian G. Schroer
  • Martin Seyrich
  • Maik Kahnt
  • Stephan Botta
  • Ralph Döhrmann
  • Gerald Falkenberg
  • Jan Garrevoet
  • Mikhail Lyubomirskiy
  • Maria Scholz
  • Andreas Schropp
  • Felix Wittwer
External organisations
  • German Electron Synchrotron (DESY)
  • University of Hamburg
Research areas and keywords

Keywords

  • Interferometry, Nanopositioning, Ptychography, X-ray scanning microscopy
Original languageEnglish
Title of host publicationX-Ray Nanoimaging
Subtitle of host publicationInstruments and Methods III
EditorsAndrea Somogyi, Barry Lai
PublisherSPIE
Volume10389
ISBN (Electronic)9781510612358
Publication statusPublished - 2017 Jan 1
Publication categoryResearch
Peer-reviewedYes
Externally publishedYes
EventX-Ray Nanoimaging: Instruments and Methods III 2017 - San Diego, United States
Duration: 2017 Aug 72017 Aug 8

Conference

ConferenceX-Ray Nanoimaging: Instruments and Methods III 2017
CountryUnited States
CitySan Diego
Period2017/08/072017/08/08