Self-cleaning and surface chemical reactions during hafnium dioxide atomic layer deposition on indium arsenide

Research output: Contribution to journalArticle

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  1. 2019
  2. Semiconductor Nanowires: Characterization and surface modification

    Sofie Yngman, 2019 Sep, Lund: Lund University (Media-Tryck). 215 p.

    Research output: ThesisDoctoral Thesis (compilation)