The beam blanking system for microlithography at Lund Nuclear microprobe

Research output: Contribution to journalArticle

Abstract

A new beam blanking system was installed at the Lund Nuclear Microprobe and employed in proton beam lithography (PBL) for polymer microstructures fabrication. The blanker consists of two parallel plates connected to a high voltage generator. Measurement of the beam blanking time on a sample was performed by means of the standard PIXE system. The beam is blanked and returns to a sample within 200 ns. The blanking system is designed for the new sub-micrometer beamline under installation in the accelerator laboratory. A number of pilot MeV ion beam lithography experiments were performed to illustrate the possibility to use the blanking system in combination with the existing data acquisition and scanning system. A 2.5 MeV proton beam was used to irradiate 50 mum SU-8 negative resist. The blanker was shown to be a necessary part of the lithography system. It enables blanking between each pixel and hence fabrication of various patterns down to a single pixel. The blanker has significantly simplified beam control and enhanced process time and spatial resolution. Three-dimensional microstructures with 20:1 aspect ratio were fabricated.

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Research areas and keywords

Subject classification (UKÄ) – MANDATORY

  • Subatomic Physics
  • Medical Engineering

Keywords

  • ion beam lithography, beam blanking, proton beam lithography, beam control, micromachining
Original languageEnglish
Pages (from-to)485-489
JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume219-20
Publication statusPublished - 2004
Publication categoryResearch
Peer-reviewedYes

Bibliographic note

The information about affiliations in this record was updated in December 2015. The record was previously connected to the following departments: Nuclear Physics (Faculty of Technology) (011013007), Biomedical Engineering (011200011)