Trimethylboron as single-source precursor for boron-carbon thin film synthesis by plasma chemical vapor deposition
Research output: Contribution to journal › Article
Boron-carbon (BxC) thin films are potential neutron converting layers for 10B-based neutron detectors. However, as common material choices for such detectors do not tolerate temperatures above 500 °C, a low temperature deposition route is required. Here, we study trimethylboron B(CH3)3 (TMB) as a single-source precursor for the deposition of BxC thin films by plasma CVD using Ar plasma. The effect of plasma power, TMB/Ar flow ratio and total pressure, on the film composition, morphology, chemical bonding, and microstructures are investigated. Dense and boron-rich films (B/C = 1.9) are achieved at high TMB flow under a low total pressure and high plasma power, which rendered an approximate substrate temperature of ∼300 °C. Films mainly contain B-C bonds with the presence of B-O and C-C, which is attributed to be the origin of formed amorphous carbon in the films. The high H content (15 ± 5 at. %) is almost independent of deposition parameters and contributed to lower the film density (2.16 g/cm3). The plasma compositional analysis shows that the TMB molecule decomposes to mainly atomic H, C2, BH, and CH. A plasma chemical model for the decomposition of TMB with BH and CH as the plausible film depositing species in the plasma is proposed.
|Research areas and keywords||
Subject classification (UKÄ) – MANDATORY
|Number of pages||8|
|Journal||Journal of Physical Chemistry C|
|Publication status||Published - 2016 Sep 29|