Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Research output: Contribution to journalArticle


Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of 4 ag/Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip.


  • E Forsen
  • G Abadal
  • Sara Ghatnekar-Nilsson
  • J Teva
  • J Verd
  • R Sandberg
  • W Svendsen
  • F Perez-Murano
  • J Esteve
  • E Figueras
  • F Campabadal
  • Lars Montelius
  • N Barniol
  • A Boisen
Research areas and keywords

Subject classification (UKÄ) – MANDATORY

  • Condensed Matter Physics
Original languageEnglish
Article number043507
JournalApplied Physics Letters
Issue number4
Publication statusPublished - 2005
Publication categoryResearch