Microelectronic Engineering, 1873-5568

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  1. Concept, construction and commissioning of an alignment system for deep X-ray lithography

    O Wilhelmi, Serguei Peredkov & Alexei Bogdanov, 2002, I : Microelectronic Engineering. 61-2, s. 1107-1112

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  2. III-V nanowires for logics and beyond

    Lars-Erik Wernersson, 2015, I : Microelectronic Engineering. 147, s. 344-348

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  3. Transfer of vertical nanowire arrays on polycaprolactone substrates for biological applications

    Inga von Ahnen, Gaelle Piret & Christelle Prinz, 2015, I : Microelectronic Engineering. 135, s. 52-56

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  4. Molecular cluster based nanoelectronics

    ES Soldatov, SP Gubin, Ivan Maximov, GB Khomutov, VV Kolesov, AN Sergeev-Cherenkov, VV Shorokhov, KS Sulaimankulov & DB Suyatin, 2003, I : Microelectronic Engineering. 69, s. 536-548

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  5. Development of nanoporous gold electrodes for electrochemical applications

    Xueling Quan, Lee M. Fischer, Anja Boisen & Maria Tenje, 2011, I : Microelectronic Engineering. 88, 8, s. 2379-2382

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  6. A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

    K Pfeiffer, F Reuther, M Fink, G Gruetzner, Patrick Carlberg, Ivan Maximov, Lars Montelius, J Seekamp, S Zankovych, C M Sotomayor-Torres, H Schulz & H C Scheer, 2003, I : Microelectronic Engineering. 67-8, s. 266-273

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  7. Polymer stamps for nanoimprinting

    K Pfeiffer, M Fink, G Ahrens, G Gruetzner, F Reuther, J Seekamp, S Zankovych, CMS Torres, Ivan Maximov, Marc Beck, Mariusz Graczyk, Lars Montelius, H Schulz, HC Scheer & F Steingrueber, 2002, I : Microelectronic Engineering. 61-2, s. 393-398

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  8. Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold

    Maria Nordström, Alicia Johansson, Encarnacion Sánchez Noguerón, Bjarne Clausen, Montserrat Calleja & Anja Boisen, 2005, I : Microelectronic Engineering. 78/79, s. 152-157

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  9. Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing

    Maria Nordström, Jörg Hübner & Anja Boisen, 2006, I : Microelectronic Engineering. 83, 4/9, s. 1269-1272

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  10. 1/f and RTS noise in InGaAs nanowire MOSFETs

    C. Möhle, C. B. Zota, M. Hellenbrand & E. Lind, 2017 jun 25, I : Microelectronic Engineering. 178, s. 52-55

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  11. Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

    Fantao Meng, Gang Luo, Ivan Maximov, Lars Montelius, Jinkui Chu & Hongqi Xu, 2011, I : Microelectronic Engineering. 88, 10, s. 3108-3112

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  12. Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP

    Ivan Maximov, Patrick Carlberg, Ivan Shorubalko, Daniel Wallin, Eva-Lena Sarwe, Marc Beck, Mariusz Graczyk, Werner Seifert, Hongqi Xu, Lars Montelius & Lars Samuelson, 2003, I : Microelectronic Engineering. 67-8, s. 196-202

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  13. Liquid-target laser-plasma source for X-ray lithography

    L Malmqvist, A. L Bogdanov, Lars Montelius & H. M Hertz, 1997, I : Microelectronic Engineering. 35, 1-4, s. 535-536

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  14. Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

    TGI Ling, Marc Beck, Richard Bunk, E Forsen, Jonas Tegenfeldt, Alexei Zakharov & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 887-892

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  15. Interfacial nanofabrication strategies in development of new functional nanomaterials and planar supramolecular nanostructures for nanoelectronics and nanotechnology

    G.B. Khomutov, V.V. Kislov, M.N. Antipina, R.V. Gainutdinov, S.P. Gubin, A.Yu. Obydenov, S.A. Pavlov, A.A. Rakhnyanskaya, A.N. Sergeev-Cherenkov, E.S. Soldatov, Dmitry Suyatin, A.L. Tolstikhina, A.S. Trifonov & T.V. Yurova, 2003, I : Microelectronic Engineering. 69, s. 373-383

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  16. Selective etching of III-V nanowires for molecular junctions

    Christian Kallesoe, Kristian Molhave, Thomas Mårtensson, Torben Mikael Hansen, Lars Samuelson & Peter Boggild, 2008, I : Microelectronic Engineering. 85, 5-6, s. 1179-1181

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  17. Single-electron devices via controlled assembly of designed nanoparticles

    Tobias Junno, Martin H. Magnusson, Sven Bertil Carlsson, Knut Deppert, Jan Olle Malm, Lars Montelius & Lars Samuelson, 1999 jun, I : Microelectronic Engineering. 47, 1-4, s. 179-183 5 s.

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  19. Dry release of all-polymer structures

    D. Haefliger, Maria Nordström, P. A. Rasmussen & Anja Boisen, 2005, I : Microelectronic Engineering. 78/79, s. 88-92

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  20. Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect

    Mariusz Graczyk, Martina Balaz, Heiner Linke & Ivan Maximov, 2012, I : Microelectronic Engineering. 97, s. 173-176

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  21. Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques

    Mariusz Graczyk, Andrea Cattoni, Benedikt Rösner, Gediminas Seniutinas, Anette Löfstrand, Anders Kvennefors, Dominique Mailly, Christian David & Ivan Maximov, 2018 apr 15, I : Microelectronic Engineering. 190, s. 73-78 6 s.

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  22. Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

    E Forsen, Patrick Carlberg, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 491-495

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  23. Dry release of suspended nanostructures

    E Forsen, ZJ Davis, M Dong, Sara Ghatnekar-Nilsson, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 487-490

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  24. Gold cleaning methods for electrochemical detection applications

    Lee M. Fischer, Maria Tenje, Arto R. Heiskanen, Noriyuki Masuda, Jaime Castillo Leon, Anders Bentien, Jenny Emnéus, Mogens H. Jakobsen & Anja Boisen, 2009, I : Microelectronic Engineering. 86, 4-6, s. 1282-1285

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  25. Nanoimprint in PDMS on glass with two-level hybrid stamp

    Patrick Carlberg, Lars Montelius & Jonas Tegenfeldt, 2008, I : Microelectronic Engineering. 85, 1, s. 210-213

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  26. Towards a 'nano-traffic' system powered by molecular motors

    Richard Bunk, J Klinth, J Rosengren, I Nicholls, S Tagerud, Pär Omling, A Mansson & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 899-904

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  27. Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production

    Alexei L. Bogdanov, Tommy Holmqvist, Piotr Jedrasik & Bengt Nilsson, 2003 jun, I : Microelectronic Engineering. 67-68, s. 381-389 9 s.

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  28. High resolution 100kV electron beam lithography in SU-8

    B. Bilenberg, S. Jacobsen, M.s. Schmidt, L.h.d. Skjolding, P. Shi, P. Bøggild, J.O. Tegenfeldt & A. Kristensen, 2006, I : Microelectronic Engineering. 83, 4-9, s. 1609-1612

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  29. Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

    Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, TGI Ling & Lars Montelius, 2004, I : Microelectronic Engineering. 73-74, s. 837-842

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  30. Improving stamps for 10 nm level wafer scale nanoimprint lithography

    Marc Beck, Mariusz Graczyk, Ivan Maximov, Eva-Lena Sarwe, TGI Ling, M Keil & Lars Montelius, 2002, I : Microelectronic Engineering. 61-2, s. 441-448

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  31. Exposure parameters for MeV proton beam writing on SU-8

    Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Christer Nilsson, Jan Pallon, Natalia Arteaga & Marie Wegdén, 2006, I : Microelectronic Engineering. 83, 10, s. 2015-2020

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift

  32. Fabrication of high aspect ratio SU-8 micropillar arrays

    Letizia Amato, Stephan S. Keller, Arto Heiskanen, Maria Dimaki, Jenny Emnéus, Anja Boisen & Maria Tenje, 2012, I : Microelectronic Engineering. 98, Special issue MNE 2011 - Part II, s. 483-487

    Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift