Microelectronic Engineering, 1873-5568
Tidskrift
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Fabrication of high aspect ratio SU-8 micropillar arrays
Letizia Amato, Stephan S. Keller, Arto Heiskanen, Maria Dimaki, Jenny Emnéus, Anja Boisen & Maria Tenje, 2012, I : Microelectronic Engineering. 98, Special issue MNE 2011 - Part II, s. 483-487Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Exposure parameters for MeV proton beam writing on SU-8
Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Christer Nilsson, Jan Pallon, Natalia Arteaga & Marie Wegdén, 2006, I : Microelectronic Engineering. 83, 10, s. 2015-2020Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, TGI Ling & Lars Montelius, 2004, I : Microelectronic Engineering. 73-74, s. 837-842Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Improving stamps for 10 nm level wafer scale nanoimprint lithography
Marc Beck, Mariusz Graczyk, Ivan Maximov, Eva-Lena Sarwe, TGI Ling, M Keil & Lars Montelius, 2002, I : Microelectronic Engineering. 61-2, s. 441-448Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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High resolution 100kV electron beam lithography in SU-8
B. Bilenberg, S. Jacobsen, M.s. Schmidt, L.h.d. Skjolding, P. Shi, P. Bøggild, J.O. Tegenfeldt & A. Kristensen, 2006, I : Microelectronic Engineering. 83, 4-9, s. 1609-1612Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production
Alexei L. Bogdanov, Tommy Holmqvist, Piotr Jedrasik & Bengt Nilsson, 2003 jun, I : Microelectronic Engineering. 67-68, s. 381-389 9 s.Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Towards a 'nano-traffic' system powered by molecular motors
Richard Bunk, J Klinth, J Rosengren, I Nicholls, S Tagerud, Pär Omling, A Mansson & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 899-904Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Nanoimprint in PDMS on glass with two-level hybrid stamp
Patrick Carlberg, Lars Montelius & Jonas Tegenfeldt, 2008, I : Microelectronic Engineering. 85, 1, s. 210-213Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Gold cleaning methods for electrochemical detection applications
Lee M. Fischer, Maria Tenje, Arto R. Heiskanen, Noriyuki Masuda, Jaime Castillo Leon, Anders Bentien, Jenny Emnéus, Mogens H. Jakobsen & Anja Boisen, 2009, I : Microelectronic Engineering. 86, 4-6, s. 1282-1285Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
E Forsen, Patrick Carlberg, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 491-495Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift