Microelectronic Engineering, 1873-5568

Tidskrift

Fler filtreringsmöjligheter
  1. 1997
  2. Liquid-target laser-plasma source for X-ray lithography

    L Malmqvist, A. L Bogdanov, Lars Montelius & H. M Hertz, 1997, I : Microelectronic Engineering. 35, 1-4, s. 535-536

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  3. 1999
  4. Single-electron devices via controlled assembly of designed nanoparticles

    Tobias Junno, Martin H. Magnusson, Sven Bertil Carlsson, Knut Deppert, Jan Olle Malm, Lars Montelius & Lars Samuelson, 1999 jun, I : Microelectronic Engineering. 47, 1-4, s. 179-183 5 s.

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  5. 2002
  6. Concept, construction and commissioning of an alignment system for deep X-ray lithography

    O Wilhelmi, Serguei Peredkov & Alexei Bogdanov, 2002, I : Microelectronic Engineering. 61-2, s. 1107-1112

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  7. Improving stamps for 10 nm level wafer scale nanoimprint lithography

    Marc Beck, Mariusz Graczyk, Ivan Maximov, Eva-Lena Sarwe, TGI Ling, M Keil & Lars Montelius, 2002, I : Microelectronic Engineering. 61-2, s. 441-448

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  8. Polymer stamps for nanoimprinting

    K Pfeiffer, M Fink, G Ahrens, G Gruetzner, F Reuther, J Seekamp, S Zankovych, CMS Torres, Ivan Maximov, Marc Beck, Mariusz Graczyk, Lars Montelius, H Schulz, HC Scheer & F Steingrueber, 2002, I : Microelectronic Engineering. 61-2, s. 393-398

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  9. 2003
  10. A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

    K Pfeiffer, F Reuther, M Fink, G Gruetzner, Patrick Carlberg, Ivan Maximov, Lars Montelius, J Seekamp, S Zankovych, C M Sotomayor-Torres, H Schulz & H C Scheer, 2003, I : Microelectronic Engineering. 67-8, s. 266-273

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  11. Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

    TGI Ling, Marc Beck, Richard Bunk, E Forsen, Jonas Tegenfeldt, Alexei Zakharov & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 887-892

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  12. Interfacial nanofabrication strategies in development of new functional nanomaterials and planar supramolecular nanostructures for nanoelectronics and nanotechnology

    G.B. Khomutov, V.V. Kislov, M.N. Antipina, R.V. Gainutdinov, S.P. Gubin, A.Yu. Obydenov, S.A. Pavlov, A.A. Rakhnyanskaya, A.N. Sergeev-Cherenkov, E.S. Soldatov, Dmitry Suyatin, A.L. Tolstikhina, A.S. Trifonov & T.V. Yurova, 2003, I : Microelectronic Engineering. 69, s. 373-383

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  13. Molecular cluster based nanoelectronics

    ES Soldatov, SP Gubin, Ivan Maximov, GB Khomutov, VV Kolesov, AN Sergeev-Cherenkov, VV Shorokhov, KS Sulaimankulov & DB Suyatin, 2003, I : Microelectronic Engineering. 69, s. 536-548

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  14. Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP

    Ivan Maximov, Patrick Carlberg, Ivan Shorubalko, Daniel Wallin, Eva-Lena Sarwe, Marc Beck, Mariusz Graczyk, Werner Seifert, Hongqi Xu, Lars Montelius & Lars Samuelson, 2003, I : Microelectronic Engineering. 67-8, s. 196-202

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

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