Microelectronic Engineering, 1873-5568

Tidskrift

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  1. 1/f and RTS noise in InGaAs nanowire MOSFETs

    C. Möhle, C. B. Zota, M. Hellenbrand & E. Lind, 2017 jun 25, I : Microelectronic Engineering. 178, s. 52-55

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  2. A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

    K Pfeiffer, F Reuther, M Fink, G Gruetzner, Patrick Carlberg, Ivan Maximov, Lars Montelius, J Seekamp, S Zankovych, C M Sotomayor-Torres, H Schulz & H C Scheer, 2003, I : Microelectronic Engineering. 67-8, s. 266-273

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  3. Concept, construction and commissioning of an alignment system for deep X-ray lithography

    O Wilhelmi, Serguei Peredkov & Alexei Bogdanov, 2002, I : Microelectronic Engineering. 61-2, s. 1107-1112

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  4. Development of nanoporous gold electrodes for electrochemical applications

    Xueling Quan, Lee M. Fischer, Anja Boisen & Maria Tenje, 2011, I : Microelectronic Engineering. 88, 8, s. 2379-2382

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  5. Dry release of all-polymer structures

    D. Haefliger, Maria Nordström, P. A. Rasmussen & Anja Boisen, 2005, I : Microelectronic Engineering. 78/79, s. 88-92

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  6. Dry release of suspended nanostructures

    E Forsen, ZJ Davis, M Dong, Sara Ghatnekar-Nilsson, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 487-490

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  7. Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production

    Alexei L. Bogdanov, Tommy Holmqvist, Piotr Jedrasik & Bengt Nilsson, 2003 jun, I : Microelectronic Engineering. 67-68, s. 381-389 9 s.

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  8. Exposure parameters for MeV proton beam writing on SU-8

    Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Christer Nilsson, Jan Pallon, Natalia Arteaga & Marie Wegdén, 2006, I : Microelectronic Engineering. 83, 10, s. 2015-2020

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  9. Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

    TGI Ling, Marc Beck, Richard Bunk, E Forsen, Jonas Tegenfeldt, Alexei Zakharov & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 887-892

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  10. Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

    Fantao Meng, Gang Luo, Ivan Maximov, Lars Montelius, Jinkui Chu & Hongqi Xu, 2011, I : Microelectronic Engineering. 88, 10, s. 3108-3112

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

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