Microelectronic Engineering, 1873-5568

Tidskrift

Fler filtreringsmöjligheter
  1. 2008
  2. Nanoimprint in PDMS on glass with two-level hybrid stamp

    Patrick Carlberg, Lars Montelius & Jonas Tegenfeldt, 2008, I : Microelectronic Engineering. 85, 1, s. 210-213

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  3. Selective etching of III-V nanowires for molecular junctions

    Christian Kallesoe, Kristian Molhave, Thomas Mårtensson, Torben Mikael Hansen, Lars Samuelson & Peter Boggild, 2008, I : Microelectronic Engineering. 85, 5-6, s. 1179-1181

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  4. 2006
  5. Exposure parameters for MeV proton beam writing on SU-8

    Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Christer Nilsson, Jan Pallon, Natalia Arteaga & Marie Wegdén, 2006, I : Microelectronic Engineering. 83, 10, s. 2015-2020

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  6. High resolution 100kV electron beam lithography in SU-8

    B. Bilenberg, S. Jacobsen, M.s. Schmidt, L.h.d. Skjolding, P. Shi, P. Bøggild, J.O. Tegenfeldt & A. Kristensen, 2006, I : Microelectronic Engineering. 83, 4-9, s. 1609-1612

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  7. Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing

    Maria Nordström, Jörg Hübner & Anja Boisen, 2006, I : Microelectronic Engineering. 83, 4/9, s. 1269-1272

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  8. 2005
  9. Dry release of all-polymer structures

    D. Haefliger, Maria Nordström, P. A. Rasmussen & Anja Boisen, 2005, I : Microelectronic Engineering. 78/79, s. 88-92

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  10. Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold

    Maria Nordström, Alicia Johansson, Encarnacion Sánchez Noguerón, Bjarne Clausen, Montserrat Calleja & Anja Boisen, 2005, I : Microelectronic Engineering. 78/79, s. 152-157

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  11. 2004
  12. Dry release of suspended nanostructures

    E Forsen, ZJ Davis, M Dong, Sara Ghatnekar-Nilsson, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 487-490

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  13. Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

    E Forsen, Patrick Carlberg, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 491-495

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  14. Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

    Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, TGI Ling & Lars Montelius, 2004, I : Microelectronic Engineering. 73-74, s. 837-842

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift