Microelectronic Engineering, 1873-5568

Tidskrift

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  1. Artikel i vetenskaplig tidskrift
  2. Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques

    Mariusz Graczyk, Andrea Cattoni, Benedikt Rösner, Gediminas Seniutinas, Anette Löfstrand, Anders Kvennefors, Dominique Mailly, Christian David & Ivan Maximov, 2018 apr 15, I : Microelectronic Engineering. 190, s. 73-78 6 s.

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  3. 1/f and RTS noise in InGaAs nanowire MOSFETs

    C. Möhle, C. B. Zota, M. Hellenbrand & E. Lind, 2017 jun 25, I : Microelectronic Engineering. 178, s. 52-55

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  4. III-V nanowires for logics and beyond

    Lars-Erik Wernersson, 2015, I : Microelectronic Engineering. 147, s. 344-348

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  5. Transfer of vertical nanowire arrays on polycaprolactone substrates for biological applications

    Inga von Ahnen, Gaelle Piret & Christelle Prinz, 2015, I : Microelectronic Engineering. 135, s. 52-56

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  6. Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect

    Mariusz Graczyk, Martina Balaz, Heiner Linke & Ivan Maximov, 2012, I : Microelectronic Engineering. 97, s. 173-176

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  7. Fabrication of high aspect ratio SU-8 micropillar arrays

    Letizia Amato, Stephan S. Keller, Arto Heiskanen, Maria Dimaki, Jenny Emnéus, Anja Boisen & Maria Tenje, 2012, I : Microelectronic Engineering. 98, Special issue MNE 2011 - Part II, s. 483-487

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  8. Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

    Fantao Meng, Gang Luo, Ivan Maximov, Lars Montelius, Jinkui Chu & Hongqi Xu, 2011, I : Microelectronic Engineering. 88, 10, s. 3108-3112

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  9. Development of nanoporous gold electrodes for electrochemical applications

    Xueling Quan, Lee M. Fischer, Anja Boisen & Maria Tenje, 2011, I : Microelectronic Engineering. 88, 8, s. 2379-2382

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  10. Gold cleaning methods for electrochemical detection applications

    Lee M. Fischer, Maria Tenje, Arto R. Heiskanen, Noriyuki Masuda, Jaime Castillo Leon, Anders Bentien, Jenny Emnéus, Mogens H. Jakobsen & Anja Boisen, 2009, I : Microelectronic Engineering. 86, 4-6, s. 1282-1285

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  11. Selective etching of III-V nanowires for molecular junctions

    Christian Kallesoe, Kristian Molhave, Thomas Mårtensson, Torben Mikael Hansen, Lars Samuelson & Peter Boggild, 2008, I : Microelectronic Engineering. 85, 5-6, s. 1179-1181

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  12. Nanoimprint in PDMS on glass with two-level hybrid stamp

    Patrick Carlberg, Lars Montelius & Jonas Tegenfeldt, 2008, I : Microelectronic Engineering. 85, 1, s. 210-213

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  13. Sloped side walls in SU-8 structures with ‘Step-and-Flash’ processing

    Maria Nordström, Jörg Hübner & Anja Boisen, 2006, I : Microelectronic Engineering. 83, 4/9, s. 1269-1272

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  14. Exposure parameters for MeV proton beam writing on SU-8

    Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Christer Nilsson, Jan Pallon, Natalia Arteaga & Marie Wegdén, 2006, I : Microelectronic Engineering. 83, 10, s. 2015-2020

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  15. High resolution 100kV electron beam lithography in SU-8

    B. Bilenberg, S. Jacobsen, M.s. Schmidt, L.h.d. Skjolding, P. Shi, P. Bøggild, J.O. Tegenfeldt & A. Kristensen, 2006, I : Microelectronic Engineering. 83, 4-9, s. 1609-1612

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  16. Dry release of all-polymer structures

    D. Haefliger, Maria Nordström, P. A. Rasmussen & Anja Boisen, 2005, I : Microelectronic Engineering. 78/79, s. 88-92

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  17. Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold

    Maria Nordström, Alicia Johansson, Encarnacion Sánchez Noguerón, Bjarne Clausen, Montserrat Calleja & Anja Boisen, 2005, I : Microelectronic Engineering. 78/79, s. 152-157

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  18. Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

    E Forsen, Patrick Carlberg, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 491-495

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  19. Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

    Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, TGI Ling & Lars Montelius, 2004, I : Microelectronic Engineering. 73-74, s. 837-842

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  20. Dry release of suspended nanostructures

    E Forsen, ZJ Davis, M Dong, Sara Ghatnekar-Nilsson, Lars Montelius & A Boisen, 2004, I : Microelectronic Engineering. 73-74, s. 487-490

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  21. Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production

    Alexei L. Bogdanov, Tommy Holmqvist, Piotr Jedrasik & Bengt Nilsson, 2003 jun, I : Microelectronic Engineering. 67-68, s. 381-389 9 s.

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  22. Fa-brication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

    TGI Ling, Marc Beck, Richard Bunk, E Forsen, Jonas Tegenfeldt, Alexei Zakharov & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 887-892

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  23. A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

    K Pfeiffer, F Reuther, M Fink, G Gruetzner, Patrick Carlberg, Ivan Maximov, Lars Montelius, J Seekamp, S Zankovych, C M Sotomayor-Torres, H Schulz & H C Scheer, 2003, I : Microelectronic Engineering. 67-8, s. 266-273

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  24. Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP

    Ivan Maximov, Patrick Carlberg, Ivan Shorubalko, Daniel Wallin, Eva-Lena Sarwe, Marc Beck, Mariusz Graczyk, Werner Seifert, Hongqi Xu, Lars Montelius & Lars Samuelson, 2003, I : Microelectronic Engineering. 67-8, s. 196-202

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  25. Towards a 'nano-traffic' system powered by molecular motors

    Richard Bunk, J Klinth, J Rosengren, I Nicholls, S Tagerud, Pär Omling, A Mansson & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 899-904

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

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