Microelectronic Engineering, 1873-5568
Tidskrift
26 - 32 av 32Sidstorlek: 25
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- 2003
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Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
Ivan Maximov, Patrick Carlberg, Ivan Shorubalko, Daniel Wallin, Eva-Lena Sarwe, Marc Beck, Mariusz Graczyk, Werner Seifert, Hongqi Xu, Lars Montelius & Lars Samuelson, 2003, I : Microelectronic Engineering. 67-8, s. 196-202Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Towards a 'nano-traffic' system powered by molecular motors
Richard Bunk, J Klinth, J Rosengren, I Nicholls, S Tagerud, Pär Omling, A Mansson & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 899-904Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
- 2002
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Concept, construction and commissioning of an alignment system for deep X-ray lithography
O Wilhelmi, Serguei Peredkov & Alexei Bogdanov, 2002, I : Microelectronic Engineering. 61-2, s. 1107-1112Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Improving stamps for 10 nm level wafer scale nanoimprint lithography
Marc Beck, Mariusz Graczyk, Ivan Maximov, Eva-Lena Sarwe, TGI Ling, M Keil & Lars Montelius, 2002, I : Microelectronic Engineering. 61-2, s. 441-448Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
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Polymer stamps for nanoimprinting
K Pfeiffer, M Fink, G Ahrens, G Gruetzner, F Reuther, J Seekamp, S Zankovych, CMS Torres, Ivan Maximov, Marc Beck, Mariusz Graczyk, Lars Montelius, H Schulz, HC Scheer & F Steingrueber, 2002, I : Microelectronic Engineering. 61-2, s. 393-398Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
- 1999
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Single-electron devices via controlled assembly of designed nanoparticles
Tobias Junno, Martin H. Magnusson, Sven Bertil Carlsson, Knut Deppert, Jan Olle Malm, Lars Montelius & Lars Samuelson, 1999 jun, I : Microelectronic Engineering. 47, 1-4, s. 179-183 5 s.Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift
- 1997
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Liquid-target laser-plasma source for X-ray lithography
L Malmqvist, A. L Bogdanov, Lars Montelius & H. M Hertz, 1997, I : Microelectronic Engineering. 35, 1-4, s. 535-536Forskningsoutput: Tidskriftsbidrag › Artikel i vetenskaplig tidskrift