Microelectronic Engineering, 1873-5568

Tidskrift

Fler filtreringsmöjligheter
  1. 2003
  2. Nanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP

    Ivan Maximov, Patrick Carlberg, Ivan Shorubalko, Daniel Wallin, Eva-Lena Sarwe, Marc Beck, Mariusz Graczyk, Werner Seifert, Hongqi Xu, Lars Montelius & Lars Samuelson, 2003, I : Microelectronic Engineering. 67-8, s. 196-202

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  3. Towards a 'nano-traffic' system powered by molecular motors

    Richard Bunk, J Klinth, J Rosengren, I Nicholls, S Tagerud, Pär Omling, A Mansson & Lars Montelius, 2003, I : Microelectronic Engineering. 67-8, s. 899-904

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  4. 2002
  5. Concept, construction and commissioning of an alignment system for deep X-ray lithography

    O Wilhelmi, Serguei Peredkov & Alexei Bogdanov, 2002, I : Microelectronic Engineering. 61-2, s. 1107-1112

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  6. Improving stamps for 10 nm level wafer scale nanoimprint lithography

    Marc Beck, Mariusz Graczyk, Ivan Maximov, Eva-Lena Sarwe, TGI Ling, M Keil & Lars Montelius, 2002, I : Microelectronic Engineering. 61-2, s. 441-448

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  7. Polymer stamps for nanoimprinting

    K Pfeiffer, M Fink, G Ahrens, G Gruetzner, F Reuther, J Seekamp, S Zankovych, CMS Torres, Ivan Maximov, Marc Beck, Mariusz Graczyk, Lars Montelius, H Schulz, HC Scheer & F Steingrueber, 2002, I : Microelectronic Engineering. 61-2, s. 393-398

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  8. 1999
  9. Single-electron devices via controlled assembly of designed nanoparticles

    Tobias Junno, Martin H. Magnusson, Sven Bertil Carlsson, Knut Deppert, Jan Olle Malm, Lars Montelius & Lars Samuelson, 1999 jun, I : Microelectronic Engineering. 47, 1-4, s. 179-183 5 s.

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

  10. 1997
  11. Liquid-target laser-plasma source for X-ray lithography

    L Malmqvist, A. L Bogdanov, Lars Montelius & H. M Hertz, 1997, I : Microelectronic Engineering. 35, 1-4, s. 535-536

    Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

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