Aerotaxy: High throughput gas-phase epitaxy of nanostructures

Forskningsoutput: KonferensbidragKonferensabstract

Abstract

Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale.

Detaljer

Författare
Enheter & grupper
Forskningsområden

Ämnesklassifikation (UKÄ) – OBLIGATORISK

  • Nanoteknik
Originalspråksvenska
StatusPublished - 2020 aug 31
PublikationskategoriForskning
Peer review utfördJa
EvenemangEuropean Aerosol Conference 2020 - Online, Aachen, Tyskland
Varaktighet: 2020 aug 312020 sep 4
https://eac2020.de

Konferens

KonferensEuropean Aerosol Conference 2020
Förkortad titelEAC 2020
LandTyskland
OrtAachen
Period2020/08/312020/09/04
Internetadress