Development of a microtomography system at the Lund sub-micron beamline

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A system for ion beam tomography has been implemented in conjunction with the new sub-micron bearriline at the Lund Nuclear Microprobe laboratory. The first version of the system is dedicated to STIM (scanning transmission ion microscopy) tomography for three-dimensional mass density analysis, but future development will allow also PIXE (particle induced X-ray emission) tomography for elemental analysis of micrometer-sized samples. The PIXE tomography will gain from the 8-element large area HPGe X-ray detector (100 mm(2) for each element) at the low beam currents inherited with a sub-micrometer beam spot size. In this work, the first results are presented together with a detailed description of the developed system, including computer control of the sample rotation. The reconstruction technique, as well as potential tomography applications is briefly discussed.


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Sidor (från-till)756-759
TidskriftNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Utgåva nummer1-2
StatusPublished - 2006
Peer review utfördJa