Droplet-target laser-plasma source for proximity x-ray lithography

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

Abstract

A compact, high-brightness and practically debris-free laser-plasma soft x-ray source for proximity x-ray lithography is described. The target of the source is small liquid fluorocarbon droplets injected into vacuum with a piezoelectrically vibrated nozzle. Emission from helium- and hydrogenlike fluorine in the 1.2-1.7 nm wavelength range was determined to similar to 2X10(12) photons/(sr-pulse). which corresponds to a conversion efficiency of similar to 5% of the 70 mJ laser pulse. Exposure of a copolymer of PMMA-MAA confirms the measured photon flux. Debris production was approximately 70 pg/sr pulse. The applicability of the source for dedicated lithography systems is discussed. (C) 1996 American Institute of Physics.

Detaljer

Författare
  • Lennart Malmqvist
  • L Rymell
  • H. M Hertz
Enheter & grupper
Forskningsområden

Ämnesklassifikation (UKÄ) – OBLIGATORISK

  • Atom- och molekylfysik och optik
Originalspråkengelska
Sidor (från-till)2627-2629
TidskriftApplied Physics Letters
Volym68
Utgåva nummer19
StatusPublished - 1996
PublikationskategoriForskning
Peer review utfördJa

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