Effect of phase composition on X-ray absorption spectra of ZrO2 thin films

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

Abstract

The X-ray photoabsorption spectra of ZrO2 films with different phase compositions were measured. The analysis of the results obtained shows that due to the site-sensitivity the X-ray photoabsorption spectroscopy is an attractive method for characterization of the ZrO2 structure. This allows application of the X-ray spectroscopy in investigation of the crystal structure in the various stages of the thin film growth including the initial stage of the ZrO2 growth. (c) 2006 Elsevier B.V. All rights reserved.

Detaljer

Författare
  • A. Kikas
  • J. Aarik
  • V. Kisand
  • K. Kooser
  • T. Kaambre
  • H. Mandar
  • T. Uustare
  • R. Rammula
  • V. Sammelselg
  • Indrek Martinson
Enheter & grupper
Forskningsområden

Ämnesklassifikation (UKÄ) – OBLIGATORISK

  • Fysik

Nyckelord

Originalspråkengelska
Sidor (från-till)303-306
TidskriftJournal of Electron Spectroscopy and Related Phenomena
Volym156
StatusPublished - 2007
PublikationskategoriForskning
Peer review utfördJa