Fabrication of 10 nm enclosed nanofluidic channels

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

Abstract

We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems.

Detaljer

Författare
Enheter & grupper
Externa organisationer
  • Princeton University
  • Nanonex Corp.
  • NanoOpto Inc.
Originalspråkengelska
Sidor (från-till)174-176
Antal sidor3
TidskriftApplied Physics Letters
Volym81
Utgåva nummer1
StatusPublished - 2002 jul 1
PublikationskategoriForskning
Peer review utfördJa