Integrated optical readout for miniaturization of cantilever-based sensor system

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

Abstract

The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.

Detaljer

Författare
  • Maria Nordström
  • Dan A. Zauner
  • Montserrat Calleja
  • Jörg Hübner
  • Anja Boisen
Externa organisationer
  • Technical University of Denmark
Forskningsområden

Ämnesklassifikation (UKÄ) – OBLIGATORISK

  • Medicinteknik
Originalspråkengelska
TidskriftApplied Physics Letters
Volym91
Utgåva nummer10
StatusPublished - 2008
PublikationskategoriForskning
Peer review utfördJa
Externt publiceradJa