Liquid-jet target for laser-plasma soft x-ray generation

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

Abstract

We describe a new liquid-target system for low-debris laser-plasma soft x-ray sources. The system is based on a microscopic liquid jet and is experimentally evaluated for 0.7-1 keV proximity lithography and water-window x-ray microscopy applications. Compared to an existing liquid-droplet target, this target system has the same low debris emission, high x-ray photon flux, and narrow spectral bandwidth. The advantages of the liquid-jet target include improved x-ray flux stability, increased range of suitable target liquids, and elimination of the need for temporal synchronization, thereby allowing less complex laser systems to be used. (C) 1996 American Institute of Physics.

Detaljer

Författare
  • Lennart Malmqvist
  • L Rymell
  • M Berglund
  • H. M Hertz
Enheter & grupper
Forskningsområden

Ämnesklassifikation (UKÄ) – OBLIGATORISK

  • Atom- och molekylfysik och optik
Originalspråkengelska
Sidor (från-till)4150-4153
TidskriftReview of Scientific Instruments
Volym67
Utgåva nummer12
StatusPublished - 1996
PublikationskategoriForskning
Peer review utfördJa

Nedladdningar

Ingen tillgänglig data