Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskrift

Abstract

Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.

Detaljer

Författare
  • Marc Beck
  • F Persson
  • Patrick Carlberg
  • Mariusz Graczyk
  • Ivan Maximov
  • TGI Ling
  • Lars Montelius
Enheter & grupper
Forskningsområden

Ämnesklassifikation (UKÄ) – OBLIGATORISK

  • Den kondenserade materiens fysik

Nyckelord

Originalspråkengelska
Sidor (från-till)837-842
TidskriftMicroelectronic Engineering
Volym73-74
StatusPublished - 2004
PublikationskategoriForskning
Peer review utfördJa