Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Marcus Törndahl; Monica Almqvist; Lars Wallman; Hans W Persson; Kjell Lindström

doi:10.1109/ULTSYM.2002.1192469

Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Marcus Törndahl, Monica Almqvist, Lars Wallman, Hans W Persson, Kjell Lindström

Avdelningen för Biomedicinsk teknik

Forskningsoutput: Kapitel i bok/rapport/Conference proceeding › Konferenspaper i proceeding › Peer review

Sammanfattning

The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers

Originalspråk	engelska
Titel på värdpublikation	2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)
Förlag	IEEE - Institute of Electrical and Electronics Engineers Inc.
Sidor	1023-1026
ISBN (tryckt)	0-7803-7582-3
DOI	https://doi.org/10.1109/ULTSYM.2002.1192469
Status	Published - 2002
Evenemang	IEEE Ultrasonics Symposium, 2002 - Munich, Tyskland Varaktighet: 2002 okt. 8 → 2002 okt. 11

Konferens

Konferens	IEEE Ultrasonics Symposium, 2002
Land/Territorium	Tyskland
Ort	Munich
Period	2002/10/08 → 2002/10/11

Ämnesklassifikation (UKÄ)

Medicinteknik

Tillgång till dokument

10.1109/ULTSYM.2002.1192469

Citera det här

Törndahl, M., Almqvist, M., Wallman, L., Persson, H. W., & Lindström, K. (2002). Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications. I 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388) (s. 1023-1026). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ULTSYM.2002.1192469

@inproceedings{16f61a6ab9854321b600284f97257420,

title = "Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications",

abstract = "The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers",

keywords = "membrane thickness, distance working range, linearity plots, SNR, S/N ratio, FFT spectra, metallized polymeric membrane, pyramid-shaped cavities, Si backplate, light diffraction tomography, transducer radiation field, capacitive micromachined US transducer, air applications, piezoelectric US transducer, ultrasonic transducer comparison, cavity size, pressure maps, bias voltage, bandwidth, 450 kHz, Si",

author = "Marcus T{\"o}rndahl and Monica Almqvist and Lars Wallman and Persson, {Hans W} and Kjell Lindstr{\"o}m",

year = "2002",

doi = "10.1109/ULTSYM.2002.1192469",

language = "English",

isbn = "0-7803-7582-3",

pages = "1023--1026",

booktitle = "2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)",

publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

note = "IEEE Ultrasonics Symposium, 2002 ; Conference date: 08-10-2002 Through 11-10-2002",

}

Törndahl, M, Almqvist, M , Wallman, L , Persson, HW & Lindström, K 2002, Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications. i 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388). IEEE - Institute of Electrical and Electronics Engineers Inc., s. 1023-1026, IEEE Ultrasonics Symposium, 2002, Munich, Tyskland, 2002/10/08. https://doi.org/10.1109/ULTSYM.2002.1192469

Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications. / Törndahl, Marcus; Almqvist, Monica ; Wallman, Lars et al.

2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388). IEEE - Institute of Electrical and Electronics Engineers Inc., 2002. s. 1023-1026.

Forskningsoutput: Kapitel i bok/rapport/Conference proceeding › Konferenspaper i proceeding › Peer review

TY - GEN

T1 - Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

AU - Törndahl, Marcus

AU - Almqvist, Monica

AU - Wallman, Lars

AU - Persson, Hans W

AU - Lindström, Kjell

PY - 2002

Y1 - 2002

N2 - The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers

AB - The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers

KW - membrane thickness

KW - distance working range

KW - linearity plots

KW - SNR

KW - S/N ratio

KW - FFT spectra

KW - metallized polymeric membrane

KW - pyramid-shaped cavities

KW - Si backplate

KW - light diffraction tomography

KW - transducer radiation field

KW - capacitive micromachined US transducer

KW - air applications

KW - piezoelectric US transducer

KW - ultrasonic transducer comparison

KW - cavity size

KW - pressure maps

KW - bias voltage

KW - bandwidth

KW - 450 kHz

KW - Si

U2 - 10.1109/ULTSYM.2002.1192469

DO - 10.1109/ULTSYM.2002.1192469

M3 - Paper in conference proceeding

SN - 0-7803-7582-3

SP - 1023

EP - 1026

BT - 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE Ultrasonics Symposium, 2002

Y2 - 8 October 2002 through 11 October 2002

ER -

Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

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