Controlling Filament Stability in Scaled Oxides (3 nm) for High Endurance (>106) Low Voltage ITO/HfO2 RRAMs for Future 3D Integration

Forskningsoutput: Kapitel i bok/rapport/Conference proceedingKonferenspaper i proceedingForskningPeer review


Non-volatile resistive-random-access-memories (RRAMs), which are highly scalable, cost-efficient and fast, are needed to meet the future computational needs beyond the traditional von-Neumann architecture. Oxygen vacancy RRAMs in particular have been demonstrated to operate at nanosecond programming ranges with low voltages as well as being integrated in dense cross-point arrays [1] . ITO/HfO 2 based RRAMs have emerged as a promising material stack due to its ultra-low switching voltages, self-compliance properties and the transparency of ITO that extends the material stack’s applications into display/wearable electronics [2] . As the different RRAM technologies are reaching maturity, scaling down the oxide thicknesses is now becoming vital for compatibility with dense 3D integration as projected by the IRDS 2020 [3] . We report that, when operated at relevant current levels (sub 100 µA), the filament integrity of ITO/HfO2 RRAM with a thin high-k oxide (3 nm) can be controlled depending on the deposition conditions, where a thermal ALD (TALD) process results in a stable filament formation as compared to a plasma enhanced ALD (PEALD) process used for depositing HfO2 . Our results further indicate that the RRAM RESET is more gradual for the TALD (oxygen deficient) HfO2 as compared to the abrupt switching behavior for the PEALD (oxygen rich) HfO2 .
Titel på värdpublikation2021 Device Research Conference (DRC)
FörlagIEEE - Institute of Electrical and Electronics Engineers Inc.
ISBN (elektroniskt)978-1-6654-1240-7
ISBN (tryckt)978-1-6654-2958-0
StatusPublished - 2021 jul 1
Evenemang2021 Device Research Conference (DRC) - Santa Barbara, CA, USA
Varaktighet: 2021 jun 202021 jun 23


Konferens2021 Device Research Conference (DRC)
OrtSanta Barbara, CA

Ämnesklassifikation (UKÄ)

  • Annan elektroteknik och elektronik
  • Den kondenserade materiens fysik


Utforska forskningsämnen för ”Controlling Filament Stability in Scaled Oxides (3 nm) for High Endurance (>106) Low Voltage ITO/HfO2 RRAMs for Future 3D Integration”. Tillsammans bildar de ett unikt fingeravtryck.

Citera det här