Sammanfattning
Abstract in Undetermined
Direct current accelerators form the basis of many front-line industrial processes. They have many advantages that have kept them at the forefront of technology for many decades, such as a small and easily managed environmental footprint. In this article, the basic principles of the different subsystems (ion and electron sources, high voltage generation, control, etc.) are overviewed. Some well-known (ion implantation and polymer processing) and lesser-known (electron beam lithography and particle-induced X-ray aerosol mapping) applications are reviewed.
Direct current accelerators form the basis of many front-line industrial processes. They have many advantages that have kept them at the forefront of technology for many decades, such as a small and easily managed environmental footprint. In this article, the basic principles of the different subsystems (ion and electron sources, high voltage generation, control, etc.) are overviewed. Some well-known (ion implantation and polymer processing) and lesser-known (electron beam lithography and particle-induced X-ray aerosol mapping) applications are reviewed.
| Originalspråk | engelska |
|---|---|
| Sidor (från-till) | 183-212 |
| Tidskrift | Reviews of Accelerator Science and Technology |
| Volym | 4 |
| Utgåva | 1 |
| DOI | |
| Status | Published - 2011 |
Ämnesklassifikation (UKÄ)
- Subatomär fysik