Direct Current Accelerators for Industrial Applications

Ragnar Hellborg, Harry J Whitlow

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskriftPeer review

1 Citering (SciVal)

Sammanfattning

Abstract in Undetermined
Direct current accelerators form the basis of many front-line industrial processes. They have many advantages that have kept them at the forefront of technology for many decades, such as a small and easily managed environmental footprint. In this article, the basic principles of the different subsystems (ion and electron sources, high voltage generation, control, etc.) are overviewed. Some well-known (ion implantation and polymer processing) and lesser-known (electron beam lithography and particle-induced X-ray aerosol mapping) applications are reviewed.
Originalspråkengelska
Sidor (från-till)183-212
TidskriftReviews of Accelerator Science and Technology
Volym4
Utgåva1
DOI
StatusPublished - 2011

Ämnesklassifikation (UKÄ)

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