Direct writing with an MeV proton beam: Development and Applications

Fysik och astronomi

• proton beams 100%
• high aspect ratio 39%
• lithography 30%
• porous silicon 26%
• fabrication 22%
• microstructure 21%
• grids 20%
• microbeams 15%
• theses 15%
• rangefinding 14%
• beam currents 12%
• mass spectroscopy 11%
• phosphors 11%
• data acquisition 11%
• installing 11%
• ions 11%
• micrometers 11%
• aspect ratio 11%
• desorption 10%
• fluence 10%
• penetration 10%
• electrostatics 9%
• ionization 8%
• microscopy 8%
• irradiation 7%
• photons 6%
• matrices 6%
• silicon 6%
• electronics 6%
• metals 6%
• lasers 5%