PtyNAMi: Ptychographic nano-analytical microscope at PETRA III - Interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

Christian G. Schroer, Martin Seyrich, Maik Kahnt, Stephan Botta, Ralph Döhrmann, Gerald Falkenberg, Jan Garrevoet, Mikhail Lyubomirskiy, Maria Scholz, Andreas Schropp, Felix Wittwer

Forskningsoutput: Kapitel i bok/rapport/Conference proceedingKonferenspaper i proceedingPeer review

14 Citeringar (SciVal)

Sammanfattning

In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

Originalspråkengelska
Titel på värdpublikationX-Ray Nanoimaging
Undertitel på värdpublikationInstruments and Methods III
RedaktörerAndrea Somogyi, Barry Lai
FörlagSPIE
Volym10389
ISBN (elektroniskt)9781510612358
DOI
StatusPublished - 2017 jan. 1
Externt publiceradJa
EvenemangX-Ray Nanoimaging: Instruments and Methods III 2017 - San Diego, USA
Varaktighet: 2017 aug. 72017 aug. 8

Konferens

KonferensX-Ray Nanoimaging: Instruments and Methods III 2017
Land/TerritoriumUSA
OrtSan Diego
Period2017/08/072017/08/08

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