Sammanfattning
In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.
Originalspråk | engelska |
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Titel på värdpublikation | X-Ray Nanoimaging |
Undertitel på värdpublikation | Instruments and Methods III |
Redaktörer | Andrea Somogyi, Barry Lai |
Förlag | SPIE |
Volym | 10389 |
ISBN (elektroniskt) | 9781510612358 |
DOI | |
Status | Published - 2017 jan. 1 |
Externt publicerad | Ja |
Evenemang | X-Ray Nanoimaging: Instruments and Methods III 2017 - San Diego, USA Varaktighet: 2017 aug. 7 → 2017 aug. 8 |
Konferens
Konferens | X-Ray Nanoimaging: Instruments and Methods III 2017 |
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Land/Territorium | USA |
Ort | San Diego |
Period | 2017/08/07 → 2017/08/08 |