Reaction Mechanisms and Dynamics in the Early Stage of High-κ Oxide Atomic Layer Deposition: Investigations by In Situ and Operando X-ray Photoemission Spectroscopy

Material Science

• Adsorption 16%
• Devices 33%
• Metal 33%
• Metal-Oxide-Semiconductor Field-Effect Transistor 16%
• Oxide Compound 100%
• Photoemission Spectroscopy 33%
• Semiconductor Material 16%
• Spectroscopy Technique 16%
• Surface 100%
• Thin Films 16%
• Titanium Dioxide 50%
• Transition Metal Oxide 16%
• Water 16%

Chemistry

• Chemical Kinetics Characteristics 8%
• Chemical Reaction 50%
• Energy 8%
• Hydrogen Atom 8%
• Ligand 33%
• Liquid Film 8%
• Metal 16%
• Photoelectron Spectroscopy 16%
• Pressure 16%
• Reaction Mechanism 100%
• Reaction Path 16%
• Water Type 8%
• X-Ray Photoelectron Spectroscopy 100%

Chemical Engineering

• Deposit 8%
• Hydrogen 8%
• Operando 100%
• Oxide 100%