Reduction of the Schottky barrier height on silicon carbide using Au nano-particles

SK Lee, CM Zetterling, M Ostling, I Åberg, Martin Magnusson, Knut Deppert, Lars-Erik Wernersson, Lars Samuelson, A Litwin

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskriftPeer review

76 Citeringar (SciVal)

Sammanfattning

By the incorporation of size-selected Au nano-particles in Ti Schottky contacts on silicon carbide, we could observe considerably lower the barrier height of the contacts. This result could be obtained for both n- and p-type Schottky contacts using current-voltage and capacitance voltage measurements. For n-type Schottky contacts, we observed reductions of 0.19-0.25 eV on 4H-SiC and 0.15-0.17 eV on 6H-SiC as compared with particle-free Ti Schottky contacts. For p-type SiC, the reduction was a little lower with 0.02-0.05 eV on 4H- and 0.10-0.13 eV on 6H-SiC. The reduction of the Schottky barrier height is explained using a model with enhanced electric field at the interface due to the small size of the circular patch and the large difference of the barrier height between Ti and Au.
Originalspråkengelska
Sidor (från-till)1433-1440
TidskriftSolid-State Electronics
Volym46
Utgåva9
DOI
StatusPublished - 2002

Ämnesklassifikation (UKÄ)

  • Den kondenserade materiens fysik
  • Elektroteknik och elektronik

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