Schottky barrier height studies of Au/4H-SiC(0001) using photoemission and synchrotron radiation

C Virojanadara, RA Glans, Balasubramanian Thiagarajan, LI Johansson, EB Macak, Q Wahab, LD Madsen

Forskningsoutput: TidskriftsbidragArtikel i vetenskaplig tidskriftPeer review

Sammanfattning

The Schottky barrier height (SBH) of Au on 4H-SiC(0001) has been studied using photoemission and synchrotron radiation. The Au was deposited in-situ on clean and well-ordered root3 X roots R30degrees reconstructed SiC surfaces prepared by in situ heating at similar to950degreesC. The SBH was determined from the shift observed in the Si 2p core level, in addition to the initial band bending determined for the clean surface. The results were compared with values obtained by electrical, capacitance-voltage (C-V), and current-voltage (I-V) characterization methods. A favorable comparison between the three independent, SBH determination methods was found.
Originalspråkengelska
Sidor (från-till)1353-1356
TidskriftJournal of Electronic Materials
Volym31
Nummer12
DOI
StatusPublished - 2002

Ämnesklassifikation (UKÄ)

  • Fysik
  • Naturvetenskap

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