Template-Assisted Selective Epitaxy of InAs on W

Johannes Svensson; Patrik Olausson; Heera Menon; Erik Lind; Mattias Borg

doi:10.1109/CSW55288.2022.9930423

Template-Assisted Selective Epitaxy of InAs on W

Johannes Svensson, Patrik Olausson, Heera Menon, Erik Lind, Mattias Borg

Forskningsoutput: Kapitel i bok/rapport/Conference proceeding › Konferenspaper i proceeding › Peer review

Sammanfattning

Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.

Originalspråk	engelska
Titel på värdpublikation	2022 Compound Semiconductor Week, CSW 2022
Förlag	IEEE - Institute of Electrical and Electronics Engineers Inc.
ISBN (elektroniskt)	9781665453400
DOI	https://doi.org/10.1109/CSW55288.2022.9930423
Status	Published - 2022
Evenemang	2022 Compound Semiconductor Week, CSW 2022 - Ann Arbor, USA Varaktighet: 2022 juni 1 → 2022 juni 3

Konferens

Konferens	2022 Compound Semiconductor Week, CSW 2022
Land/Territorium	USA
Ort	Ann Arbor
Period	2022/06/01 → 2022/06/03

Ämnesklassifikation (UKÄ)

Annan elektroteknik och elektronik

Tillgång till dokument

10.1109/CSW55288.2022.9930423

III-V komponenter för nya elektroniska applikationer
Olausson, P. (Forskarstuderande), Lind, E. (Handledare) & Borg, M. (Biträdande handledare)
2019/07/01 → 2024/02/23
Projekt: Avhandling

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title = "Template-Assisted Selective Epitaxy of InAs on W",

abstract = "Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.",

author = "Johannes Svensson and Patrik Olausson and Heera Menon and Erik Lind and Mattias Borg",

year = "2022",

doi = "10.1109/CSW55288.2022.9930423",

language = "English",

booktitle = "2022 Compound Semiconductor Week, CSW 2022",

publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

note = "2022 Compound Semiconductor Week, CSW 2022 ; Conference date: 01-06-2022 Through 03-06-2022",

}

TY - GEN

T1 - Template-Assisted Selective Epitaxy of InAs on W

AU - Svensson, Johannes

AU - Olausson, Patrik

AU - Menon, Heera

AU - Lind, Erik

AU - Borg, Mattias

PY - 2022

Y1 - 2022

N2 - Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.

AB - Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.

U2 - 10.1109/CSW55288.2022.9930423

DO - 10.1109/CSW55288.2022.9930423

M3 - Paper in conference proceeding

AN - SCOPUS:85142515565

BT - 2022 Compound Semiconductor Week, CSW 2022

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

T2 - 2022 Compound Semiconductor Week, CSW 2022

Y2 - 1 June 2022 through 3 June 2022

ER -

Template-Assisted Selective Epitaxy of InAs on W

Sammanfattning

Konferens

Ämnesklassifikation (UKÄ)

Tillgång till dokument

Fingeravtryck

Projekt

III-V komponenter för nya elektroniska applikationer

Citera det här