Template-Assisted Selective Epitaxy of InAs on W

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Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.

Titel på värdpublikation2022 Compound Semiconductor Week, CSW 2022
FörlagIEEE - Institute of Electrical and Electronics Engineers Inc.
ISBN (elektroniskt)9781665453400
StatusPublished - 2022
Evenemang2022 Compound Semiconductor Week, CSW 2022 - Ann Arbor, USA
Varaktighet: 2022 juni 12022 juni 3


Konferens2022 Compound Semiconductor Week, CSW 2022
OrtAnn Arbor

Ämnesklassifikation (UKÄ)

  • Annan elektroteknik och elektronik


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